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Charge Density-Based Pyroelectric Vacuum Sensor.

ABSTRACT: A traditional thermal conductivity vacuum gauge mainly detects low pressure (the degree of vacuum) by measuring the temperature change of a filament heated by the electric current. We propose a novel pyroelectric vacuum sensor that utilizes the effect of ambient thermal conductivity on the pyroelectric effect to detect vacuum through the charge density of ferroelectric materials under radiation. The functional relationship between the charge density and low pressure is derived, which is validated in a suspended (Pb,La)(Zr,Ti,Ni)O₃ (PLZTN) ferroelectric ceramic-based device. The charge density of the indium tin oxide/PLZTN/Ag device under 405 nm of 60.5 mW cm^-2 radiation at low pressure reaches 4.48 μC cm^-2, which is increased by about 3.0 times compared with that at atmospheric pressure. The vacuum can improve the charge density without increasing the radiation energy, confirming the important role of ambient thermal conductivity on the pyroelectric effect. This research provides a demonstration for ambient thermal conductivity effectively tuning pyroelectric performance, a theoretical basis for pyroelectric vacuum sensors, and a feasible route for further optimizing the performance of pyroelectric photoelectric devices.

SUBMITTER: Xu L

PROVIDER: S-EPMC10076003 | biostudies-literature | 2023

REPOSITORIES: biostudies-literature

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Charge Density-Based Pyroelectric Vacuum Sensor.

Xu Lan L Huangfu Geng G Guo Yiping Y Yang Ya Y

Research (Washington, D.C.) 20230116

A traditional thermal conductivity vacuum gauge mainly detects low pressure (the degree of vacuum) by measuring the temperature change of a filament heated by the electric current. We propose a novel pyroelectric vacuum sensor that utilizes the effect of ambient thermal conductivity on the pyroelectric effect to detect vacuum through the charge density of ferroelectric materials under radiation. The functional relationship between the charge density and low pressure is derived, which is validate ...[more]

PMID: 37040496

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Project description:NDIR CO2 gas sensors using a 10-cm-long gas channel and CMOS-compatible 12% doped ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm and fast response time of ∼2 s. Here, we increase the doping concentration of Sc to 20% in our ScAlN-based pyroelectric detector and miniaturize the gas channel by ∼65× volume with length reduction from 10 to 4 cm and diameter reduction from 5 to 1 mm. The CMOS-compatible 20% ScAlN-based pyroelectric detectors are fabricated over 8-in. wafers, allowing cost reduction leveraging on semiconductor manufacturing. Cross-sectional TEM images show the presence of abnormally oriented grains in the 20% ScAlN sensing layer in the pyroelectric detector stack. Optically, the absorption spectrum of the pyroelectric detector stack across the mid-infrared wavelength region shows ∼50% absorption at the CO2 absorption wavelength of 4.26 μm. The pyroelectric coefficient of these 20% ScAlN with abnormally oriented grains shows, in general, a higher value compared to that for 12% ScAlN. While keeping the temperature variation constant at 2 °C, we note that the pyroelectric coefficient seems to increase with background temperature. CO2 gas responses are measured for 20% ScAlN-based pyroelectric detectors in both 10-cm-long and 4-cm-long gas channels, respectively. The results show that for the miniaturized CO2 gas sensor, we are able to measure the gas response from 5000 ppm down to 100 ppm of CO2 gas concentration with CO2 gas response time of ∼5 s, sufficient for practical applications as the average outdoor CO2 level is ∼400 ppm. The selectivity of this miniaturized CO2 gas sensor is also tested by mixing CO2 with nitrogen and 49% sulfur hexafluoride, respectively. The results show high selectivity to CO2 with nitrogen and 49% sulfur hexafluoride each causing a minimum ∼0.39% and ∼0.36% signal voltage change, respectively. These results bring promise to compact and miniature low cost CO2 gas sensors based on pyroelectric detectors, which could possibly be integrated with consumer electronics for real-time air quality monitoring.

Dataset Information

Charge Density-Based Pyroelectric Vacuum Sensor.

Publications

Charge Density-Based Pyroelectric Vacuum Sensor.

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