Ontology highlight
ABSTRACT:
SUBMITTER: Hochreiter A
PROVIDER: S-EPMC10625639 | biostudies-literature | 2023 Nov
REPOSITORIES: biostudies-literature
Hochreiter André A Groß Fabian F Möller Morris-Niklas MN Krieger Michael M Weber Heiko B HB
Scientific reports 20231104 1
Silicon Carbide (SiC) is an outstanding material, not only for electronic applications, but also for projected functionalities in the realm of spin-based quantum technologies, nano-mechanical resonators and photonics-on-a-chip. For shaping 3D structures out of SiC wafers, predominantly dry-etching techniques are used. SiC is nearly inert with respect to wet etching, occasionally photoelectrochemical etching strategies have been applied. Here, we propose an electrochemical etching strategy that s ...[more]