Ontology highlight
ABSTRACT:
SUBMITTER: Shim W
PROVIDER: S-EPMC3494923 | biostudies-literature | 2012 Nov
REPOSITORIES: biostudies-literature
Shim Wooyoung W Brown Keith A KA Zhou Xiaozhu X Rasin Boris B Liao Xing X Mirkin Chad A CA
Proceedings of the National Academy of Sciences of the United States of America 20121018 45
Scanning probe instruments have expanded beyond their traditional role as imaging or "reading" tools and are now routinely used for "writing." Although a variety of scanning probe lithography techniques are available, each one imposes different requirements on the types of probes that must be used. Additionally, throughput is a major concern for serial writing techniques, so for a scanning probe lithography technique to become widely applied, there needs to be a reasonable path toward a scalable ...[more]