Ontology highlight
ABSTRACT:
SUBMITTER: Wang D
PROVIDER: S-EPMC3570473 | biostudies-literature | 2013 Jan
REPOSITORIES: biostudies-literature
Wang Dong D Ji Ran R Du Song S Albrecht Arne A Schaaf Peter P
Nanoscale research letters 20130121 1
The fabrication of ordered arrays of nanoporous Si nanopillars with and without nanoporous base and ordered arrays of Si nanopillars with nanoporous shells are presented. The fabrication route is using a combination of substrate conformal imprint lithography and metal-assisted chemical etching. The metal-assisted chemical etching is performed in solutions with different [HF]/[H2O2 + HF] ratios. Both pore formation and polishing (marked by the vertical etching of the nanopillars) are observed in ...[more]