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Integration of microplasma with transmission electron microscopy: Real-time observation of gold sputtering and island formation.

ABSTRACT: An in situ platform for characterizing plasma-materials interactions at the nanoscale in the transmission electron microscope (TEM) has been demonstrated. Integrating a DC microplasma device, having plane-parallel electrodes with a 25?nm thick Au film on both the cathode and anode and operating in 760 Torr of Ar, within a TEM provides real-time observation of Au sputtering and island formation with a spatial resolution of < 100?nm. Analyses of TEM and atomic force microscopy images show the growth of Au islands to proceed by a Stranski-Krastanov process at a rate that varies linearly with the discharge power and is approximately a factor of 3 larger than the predictions of a DC plasma sputtering model. The experiments reported here extend in situ TEM diagnostics to plasma-solid and plasma-liquid interactions.

SUBMITTER: Tai K

PROVIDER: S-EPMC3579186 | biostudies-literature | 2013

REPOSITORIES: biostudies-literature

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Integration of microplasma with transmission electron microscopy: Real-time observation of gold sputtering and island formation.

Tai K K Houlahan T J TJ Eden J G JG Dillon S J SJ

Scientific reports 20130101

An in situ platform for characterizing plasma-materials interactions at the nanoscale in the transmission electron microscope (TEM) has been demonstrated. Integrating a DC microplasma device, having plane-parallel electrodes with a 25 nm thick Au film on both the cathode and anode and operating in 760 Torr of Ar, within a TEM provides real-time observation of Au sputtering and island formation with a spatial resolution of < 100 nm. Analyses of TEM and atomic force microscopy images show the grow ...[more]

PMID: 23429577

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