Ontology highlight
ABSTRACT:
SUBMITTER: Shen C
PROVIDER: S-EPMC3724177 | biostudies-literature | 2013
REPOSITORIES: biostudies-literature
Shen Caiwei C Wang Xiaohong X Zhang Wenfeng W Kang Feiyu F
Scientific reports 20130101
Prototyping of nanoporous carbon membranes with three-dimensional microscale patterns is significant for integration of such multifunctional materials into various miniaturized systems. Incorporating nano material synthesis into microelectronics technology, we present a novel approach to direct prototyping of carbon membranes with highly nanoporous structures inside. Membranes with significant thicknesses (1 ~ 40 μm) are rapidly prototyped at wafer level by combining nano templating method with ...[more]