Ontology highlight
ABSTRACT:
SUBMITTER: Yamada S
PROVIDER: S-EPMC3926976 | biostudies-literature | 2014 Feb
REPOSITORIES: biostudies-literature
Yamada Shigeru S Kurokawa Yasuyoshi Y Miyajima Shinsuke S Konagai Makoto M
Nanoscale research letters 20140212 1
We investigate the effects of hydrogen plasma treatment (HPT) on the properties of silicon quantum dot superlattice films. Hydrogen introduced in the films efficiently passivates silicon and carbon dangling bonds at a treatment temperature of approximately 400°C. The total dangling bond density decreases from 1.1 × 1019 cm-3 to 3.7 × 1017 cm-3, which is comparable to the defect density of typical hydrogenated amorphous silicon carbide films. A damaged layer is found to form on the surface by HPT ...[more]