A micro-fabricated force sensor using an all thin film piezoelectric active sensor.
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ABSTRACT:
SUBMITTER: Lee J
PROVIDER: S-EPMC4299009 | biostudies-literature | 2014 Nov
REPOSITORIES: biostudies-literature
Publications
A micro-fabricated force sensor using an all thin film piezoelectric active sensor.
Lee Junwoo J Choi Wook W Yoo Yong Kyoung YK Hwang Kyo Seon KS Lee Sang-Myung SM Kang Sungchul S Kim Jinseok J Lee Jeong Hoon JH
Sensors (Basel, Switzerland) 20141125 12
The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle to ...[more]
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