Ontology highlight
ABSTRACT:
SUBMITTER: Guan B
PROVIDER: S-EPMC4521158 | biostudies-literature | 2015 Jul
REPOSITORIES: biostudies-literature
Guan Bin B Siampour Hamidreza H Fan Zhao Z Wang Shun S Kong Xiang Yang XY Mesli Abdelmadjid A Zhang Jian J Dan Yaping Y
Scientific reports 20150731
This Report presents a nitrogen-doping method by chemically forming self-assembled monolayers on silicon. Van der Pauw technique, secondary-ion mass spectroscopy and low temperature Hall effect measurements are employed to characterize the nitrogen dopants. The experimental data show that the diffusion coefficient of nitrogen dopants is 3.66 × 10(-15) cm(2) s(-1), 2 orders magnitude lower than that of phosphorus dopants in silicon. It is found that less than 1% of nitrogen dopants exhibit electr ...[more]