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Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.

ABSTRACT: This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via the evaluation of the actuation performance of MEMS resonators. Conditions such as annealing duration, poling field and poling duration have been optimized and repeatability of the process has been demonstrated.

SUBMITTER: Ducrot PH

PROVIDER: S-EPMC4726305 | biostudies-literature | 2016 Jan

REPOSITORIES: biostudies-literature

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Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.

Ducrot Pierre-Henri PH Dufour Isabelle I Ayela Cédric C

Scientific reports 20160121

This paper reports a systematic optimization of processing conditions of PVDF-TrFE piezoelectric thin films, used as integrated transducers in organic MEMS resonators. Indeed, despite data on electromechanical properties of PVDF found in the literature, optimized processing conditions that lead to these properties remain only partially described. In this work, a rigorous optimization of parameters enabling state-of-the-art piezoelectric properties of PVDF-TrFE thin films has been performed via t ...[more]

PMID: 26792224

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