Ontology highlight
ABSTRACT:
SUBMITTER: Qin J
PROVIDER: S-EPMC4768307 | biostudies-literature | 2016
REPOSITORIES: biostudies-literature
Light, science & applications 20160226
Quantitative optical measurements of deep sub-wavelength, three-dimensional, nanometric structures with sensitivity to sub-nanometer details address an ubiquitous measurement challenge. A Fourier domain normalization approach is used in the Fourier optical imaging code to simulate the full three-dimensional scattered light field of nominally 15 nm sized structures, accurately replicating the light field as a function of the focus position. Using the full three-dimensional light field, nanometer ...[more]