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Highly Bendable In-Ga-ZnO Thin Film Transistors by Using a Thermally Stable Organic Dielectric Layer.


ABSTRACT: Flexible In-Ga-ZnO (IGZO) thin film transistor (TFT) on a polyimide substrate is produced by employing a thermally stable SA7 organic material as the multi-functional barrier and dielectric layers. The IGZO channel layer was sputtered at Ar:O2 gas flow rate of 100:1 sccm and the fabricated TFT exhibited excellent transistor performances with a mobility of 15.67?cm2/Vs, a threshold voltage of 6.4?V and an on/off current ratio of 4.5?×?105. Further, high mechanical stability was achieved by the use of organic/inorganic stacking of dielectric and channel layers. Thus, the IGZO transistor endured unprecedented bending strain up to 3.33% at a bending radius of 1.5?mm with no significant degradation in transistor performances along with a superior reliability up to 1000 cycles.

SUBMITTER: Kumaresan Y 

PROVIDER: S-EPMC5120347 | biostudies-literature | 2016 Nov

REPOSITORIES: biostudies-literature

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Highly Bendable In-Ga-ZnO Thin Film Transistors by Using a Thermally Stable Organic Dielectric Layer.

Kumaresan Yogeenth Y   Pak Yusin Y   Lim Namsoo N   Kim Yonghun Y   Park Min-Ji MJ   Yoon Sung-Min SM   Youn Hyoc-Min HM   Lee Heon H   Lee Byoung Hun BH   Jung Gun Young GY  

Scientific reports 20161123


Flexible In-Ga-ZnO (IGZO) thin film transistor (TFT) on a polyimide substrate is produced by employing a thermally stable SA7 organic material as the multi-functional barrier and dielectric layers. The IGZO channel layer was sputtered at Ar:O<sub>2</sub> gas flow rate of 100:1 sccm and the fabricated TFT exhibited excellent transistor performances with a mobility of 15.67 cm<sup>2</sup>/Vs, a threshold voltage of 6.4 V and an on/off current ratio of 4.5 × 10<sup>5</sup>. Further, high mechanical  ...[more]

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