Ontology highlight
ABSTRACT:
SUBMITTER: Hofmann F
PROVIDER: S-EPMC5382701 | biostudies-literature | 2017 Apr
REPOSITORIES: biostudies-literature
Hofmann Felix F Tarleton Edmund E Harder Ross J RJ Phillips Nicholas W NW Ma Pui-Wai PW Clark Jesse N JN Robinson Ian K IK Abbey Brian B Liu Wenjun W Beck Christian E CE
Scientific reports 20170406
Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga<sup>+</sup>), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter on the nano-scale revolutionised sample preparation across the life, earth and materials sciences. Despite its widespread usage, detailed understanding of the FIB-induced structural damage, intrinsic to the technique, remains elusive. Here we examin ...[more]