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50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors.


ABSTRACT: X-ray spectromicroscopy with a full-field imaging technique is a powerful method for chemical analysis of heterogeneous complex materials with a nano-scale spatial resolution. For imaging optics, an X-ray reflective optical system has excellent capabilities with highly efficient, achromatic, and long-working-distance properties. An advanced Kirkpatrick-Baez geometry that combines four independent mirrors with elliptic and hyperbolic shapes in both horizontal and vertical directions was developed for this purpose, although the complexity of the system has a limited applicable range. Here, we present an optical system consisting of two monolithic imaging mirrors. Elliptic and hyperbolic shapes were formed on a single substrate to achieve both high resolution and sufficient stability. The mirrors were finished with a ~1-nm shape accuracy using elastic emission machining. The performance was tested at SPring-8 with a photon energy of approximately 10?keV. We could clearly resolve 50-nm features in a Siemens star without chromatic aberration and with high stability over 20?h. We applied this system to X-ray absorption fine structure spectromicroscopy and identified elements and chemical states in specimens of zinc and tungsten micron-size particles.

SUBMITTER: Matsuyama S 

PROVIDER: S-EPMC5390314 | biostudies-literature | 2017 Apr

REPOSITORIES: biostudies-literature

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50-nm-resolution full-field X-ray microscope without chromatic aberration using total-reflection imaging mirrors.

Matsuyama Satoshi S   Yasuda Shuhei S   Yamada Jumpei J   Okada Hiromi H   Kohmura Yoshiki Y   Yabashi Makina M   Ishikawa Tetsuya T   Yamauchi Kazuto K  

Scientific reports 20170413


X-ray spectromicroscopy with a full-field imaging technique is a powerful method for chemical analysis of heterogeneous complex materials with a nano-scale spatial resolution. For imaging optics, an X-ray reflective optical system has excellent capabilities with highly efficient, achromatic, and long-working-distance properties. An advanced Kirkpatrick-Baez geometry that combines four independent mirrors with elliptic and hyperbolic shapes in both horizontal and vertical directions was developed  ...[more]

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