Ontology highlight
ABSTRACT:
SUBMITTER: Benetti D
PROVIDER: S-EPMC5451404 | biostudies-literature | 2017 May
REPOSITORIES: biostudies-literature
Benetti D D Nouar R R Nechache R R Pepin H H Sarkissian A A Rosei F F MacLeod J M JM
Scientific reports 20170531 1
We report the successful demonstration of a hybrid system that combines pulsed laser deposition (PLD) and magnetron sputtering (MS) to deposit high quality thin films. The PLD and MS simultaneously use the same target, leading to an enhanced deposition rate. The performance of this technique is demonstrated through the deposition of titanium dioxide and bismuth-based perovskite oxide Bi<sub>2</sub>FeCrO<sub>6</sub> (BFCO) thin films on Si(100) and LaAlO<sub>3</sub> (LAO) (100). These specific ox ...[more]