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Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides.

ABSTRACT:

Abstract

Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In₂O_3-x S _x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [<62% (S/(S + O)) for the n-butyl derivatives]. In addition to thin films, polycrystalline 1D structures are obtained at slightly modified synthesis conditions. The materials are analysed by EDX, XRD, XPS, SEM, and TEM.

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SUBMITTER: Biegger F

PROVIDER: S-EPMC5504136 | biostudies-literature | 2017

REPOSITORIES: biostudies-literature

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Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides.

Biegger Felix F Jungwirth Felix F Seifner Michael Stanislaus MS Rameshan Christoph C Barth Sven S

Monatshefte fur chemie 20170602 8

<h4>Abstract</h4>Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3-x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide content [<62% (S/(S + O)) for the n</ ...[more]

PMID: 28751793

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