Ontology highlight
ABSTRACT:
SUBMITTER: Ding T
PROVIDER: S-EPMC5578361 | biostudies-literature | 2017 Jun
REPOSITORIES: biostudies-literature
ACS photonics 20170525 6
Under UV illumination, polymer films can undergo chain scission and contract. Using this effect, tightly focused laser light is shown to develop runaway near-field concentration that drills sub-100 nm pits through a thin film. This subwavelength photolithography can be controlled in real time by monitoring laser scatter from the evolving holes, allowing systematic control of the void diameter. Our model shows how interference between the substrate and film together with near-field focusing by th ...[more]