Ontology highlight
ABSTRACT:
SUBMITTER: Tokel O
PROVIDER: S-EPMC5624509 | biostudies-literature | 2017 Oct
REPOSITORIES: biostudies-literature
Tokel Onur O Turnali Ahmet A Makey Ghaith G Elahi Parviz P Çolakoğlu Tahir T Ergeçen Emre E Yavuz Özgün Ö Hübner René R Borra Mona Zolfaghari MZ Pavlov Ihor I Bek Alpan A Turan Raşit R Kesim Denizhan Koray DK Tozburun Serhat S Ilday Serim S Ilday F Ömer FÖ
Nature photonics 20170929 10
Silicon is an excellent material for microelectronics and integrated photonics1-3 with untapped potential for mid-IR optics4. Despite broad recognition of the importance of the third dimension5,6, current lithography methods do not allow fabrication of photonic devices and functional microelements directly inside silicon chips. Even relatively simple curved geometries cannot be realised with techniques like reactive ion etching. Embedded optical elements, like in glass7, electronic devices, and ...[more]