Ontology highlight
ABSTRACT:
SUBMITTER: Serban EA
PROVIDER: S-EPMC5629253 | biostudies-literature | 2017 Oct
REPOSITORIES: biostudies-literature
Serban Elena Alexandra EA Palisaitis Justinas J Yeh Chia-Cheng CC Hsu Hsu-Cheng HC Tsai Yu-Lin YL Kuo Hao-Chung HC Junaid Muhammad M Hultman Lars L Persson Per Ola Åke POÅ Birch Jens J Hsiao Ching-Lien CL
Scientific reports 20171005 1
Selective-area growth (SAG) of single-crystal wurtzite GaN nanorods (NRs) directly onto Si(001) substrates with un-etched native SiO<sub>x</sub> amorphous layer, assisted by a patterning TiN<sub>x</sub> mask fabricated by nanosphere lithography (NSL), has been realized by reactive magnetron sputter epitaxy (MSE). The GaN NRs were grown vertically to the substrate surface with the growth direction along c-axis in the well-defined nano-opening areas. A 5-step structural and morphological evolution ...[more]