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Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride.


ABSTRACT: Phosphorus- and boron-doped silicon nanocrystals (Si NCs) embedded in silicon oxide matrix can be fabricated by plasma-enhanced chemical vapour deposition (PECVD). Conventionally, SiH4 and N2O are used as precursor gasses, which inevitably leads to the incorporation of ≈10 atom % nitrogen, rendering the matrix a silicon oxynitride. Alternatively, SiH4 and O2 can be used, which allows for completely N-free silicon oxide. In this work, we investigate the properties of B- and P-incorporating Si NCs embedded in pure silicon oxide compared to silicon oxynitride by atom probe tomography (APT), low-temperature photoluminescence (PL), transient transmission (TT), and current-voltage (I-V) measurements. The results clearly show that no free carriers, neither from P- nor from B-doping, exist in the Si NCs, although in some configurations charge carriers can be generated by electric field ionization. The absence of free carriers in Si NCs ≤5 nm in diameter despite the presence of P- or B-atoms has severe implications for future applications of conventional impurity doping of Si in sub-10 nm technology nodes.

SUBMITTER: Hiller D 

PROVIDER: S-EPMC6009393 | biostudies-literature | 2018

REPOSITORIES: biostudies-literature

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Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride.

Hiller Daniel D   López-Vidrier Julian J   Nomoto Keita K   Wahl Michael M   Bock Wolfgang W   Chlouba Tomáš T   Trojánek František F   Gutsch Sebastian S   Zacharias Margit M   König Dirk D   Malý Petr P   Kopnarski Michael M  

Beilstein journal of nanotechnology 20180518


Phosphorus- and boron-doped silicon nanocrystals (Si NCs) embedded in silicon oxide matrix can be fabricated by plasma-enhanced chemical vapour deposition (PECVD). Conventionally, SiH<sub>4</sub> and N<sub>2</sub>O are used as precursor gasses, which inevitably leads to the incorporation of ≈10 atom % nitrogen, rendering the matrix a silicon oxynitride. Alternatively, SiH<sub>4</sub> and O<sub>2</sub> can be used, which allows for completely N-free silicon oxide. In this work, we investigate the  ...[more]

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