Ontology highlight
ABSTRACT:
SUBMITTER: Konig D
PROVIDER: S-EPMC6122087 | biostudies-literature | 2018
REPOSITORIES: biostudies-literature
König Dirk D Hiller Daniel D Wilck Noël N Berghoff Birger B Müller Merlin M Thakur Sangeeta S Di Santo Giovanni G Petaccia Luca L Mayer Joachim J Smith Sean S Knoch Joachim J
Beilstein journal of nanotechnology 20180823
Impurity doping of ultrasmall nanoscale (usn) silicon (Si) currently used in ultralarge scale integration (ULSI) faces serious miniaturization challenges below the 14 nm technology node such as dopant out-diffusion and inactivation by clustering in Si-based field-effect transistors (FETs). Moreover, self-purification and massively increased ionization energy cause doping to fail for Si nano-crystals (NCs) showing quantum confinement. To introduce electron- (n-) or hole- (p-) type conductivity, u ...[more]