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Self-Aligned Interdigitated Transducers for Acoustofluidics.

ABSTRACT: The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need for clean room facilities and alignment. The IDTs and microfluidic channels are fabricated using the same process and thus are precisely self-aligned in accordance with the device design. With the use of the developed fabrication approach, a few types of different SAW-based microfluidic devices have been fabricated and demonstrated for particle separation and active droplet generation.

SUBMITTER: Ma Z

PROVIDER: S-EPMC6189727 | biostudies-literature | 2016 Nov

REPOSITORIES: biostudies-literature

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Self-Aligned Interdigitated Transducers for Acoustofluidics.

Ma Zhichao Z Teo Adrian J T AJT Tan Say Hwa SH Ai Ye Y Nguyen Nam-Trung NT

Micromachines 20161125 12

The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices ...[more]

PMID: 30404386

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