Ontology highlight
ABSTRACT:
SUBMITTER: Thuau D
PROVIDER: S-EPMC6220165 | biostudies-literature | 2018
REPOSITORIES: biostudies-literature
Thuau Damien D Laval Cédric C Dufour Isabelle I Poulin Philippe P Ayela Cédric C Salmon Jean-Baptiste JB
Microsystems & nanoengineering 20180702
In view of the extensive increase of flexible devices and wearable electronics, the development of polymer micro-electro-mechanical systems (MEMS) is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly established. Nevertheless, polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart, and innovative microfabrication techniques are still expected. We show in the prese ...[more]