Ontology highlight
ABSTRACT:
SUBMITTER: Kim JH
PROVIDER: S-EPMC6355768 | biostudies-literature | 2019 Jan
REPOSITORIES: biostudies-literature
Kim Jung-Hwan JH Moon Seunghyun S Kim Ji-Woong JW Lee Donggun D Park Byong Chon BC Kim Dal-Hyun DH Jeong Yoojin Y Hand Sean S Osborne Jason J De Wolf Peter P Kim Youn Sang YS Shin ChaeHo C
Scientific reports 20190131 1
In current nanoscale semiconductor fabrications, high dielectric materials and ultrathin multilayers have been selected to improve the performance of the devices. Thus, interface effects between films and the quantification of surface information are becoming key issues for determining the performance of the semiconductor devices. In this paper, we developed an easy, accurate, and nondestructive diagnosis to investigate the interface effect of hafnium oxide ultrathin films. A roughness scaling m ...[more]