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Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure.


ABSTRACT: Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture the response of the resonator under double resonance excitation. Therefore, we develop a coupled mechanical and electrical mathematical linearized model at different operation frequencies and validate this model experimentally. The double-resonance excitation results in a 21 times amplification of the voltage across the resonator and 31 times amplitude amplification over classical excitation schemes. This intensive experimental study showed a great potential of double resonance excitation providing a high amplitude amplification and maintaining the linearity of the system when the parasitic capacitance is maintained low.

SUBMITTER: Hasan MH 

PROVIDER: S-EPMC6359633 | biostudies-literature | 2019 Jan

REPOSITORIES: biostudies-literature

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Voltage and Deflection Amplification via Double Resonance Excitation in a Cantilever Microstructure.

Hasan Mohammad H MH   Alsaleem Fadi F   Ramini Abdallah A  

Sensors (Basel, Switzerland) 20190118 2


Cantilever electrostatically-actuated resonators show great promise in sensing and actuating applications. However, the electrostatic actuation suffers from high-voltage actuation requirements and high noise low-amplitude signal-outputs which limit its applications. Here, we introduce a mixed-frequency signal for a cantilever-based resonator that triggers its mechanical and electrical resonances simultaneously, to overcome these limitations. A single linear RLC circuit cannot completely capture  ...[more]

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