Browse
Submit Data
Databases
API
Help

Dataset Information

0 Views

0 Connections

0 Citations

0 Reanalyses

0 Downloads

Omics score: 0

Single step fabrication of Silicon resistors on SOI substrate used as Thermistors.

ABSTRACT: Temperature sensing is one of the important features of Micro Electro Mechanical Systems and a monolithic integration provides advantages for both fabrication simplicity and performance. The use of Silicon On Insulator substrates allows simple fabrication of integrated wires that can be used as thermistors. We fabricated rectangular and triangular silicon wires with different dimensions in a single step fabrication process based on the wet etching of a <110> Silicon On Insulator substrate. We determined the experimental resistivity of the two kinds of devices and tested their performance as thermistors in a temperature range between 24 and 100?°C. The accuracy and normalized sensitivities of our devices were 0.4?°C and 0.3-0.5%/°C, respectively. The potential of the proposed method resides in the possibility of having devices with different shapes in a single straightforward process.

SUBMITTER: Rollo S

PROVIDER: S-EPMC6391396 | biostudies-literature | 2019 Feb

REPOSITORIES: biostudies-literature

ACCESS DATA

Json Xml

Publications

Single step fabrication of Silicon resistors on SOI substrate used as Thermistors.

Rollo Serena S Rani Dipti D Olthuis Wouter W Pascual García César C

Scientific reports 20190226 1

Temperature sensing is one of the important features of Micro Electro Mechanical Systems and a monolithic integration provides advantages for both fabrication simplicity and performance. The use of Silicon On Insulator substrates allows simple fabrication of integrated wires that can be used as thermistors. We fabricated rectangular and triangular silicon wires with different dimensions in a single step fabrication process based on the wet etching of a <110> Silicon On Insulator substrate. We de ...[more]

PMID: 30808888

Similar Datasets

A Temperature-Compensated Single-Crystal Silicon-on-Insulator (SOI) MEMS Oscillator with a CMOS Amplifier Chip.

Project description:Self-sustained feedback oscillators referenced to MEMS/NEMS resonators have the potential for a wide range of applications in timing and sensing systems. In this paper, we describe a real-time temperature compensation approach to improving the long-term stability of such MEMS-referenced oscillators. This approach is implemented on a ~26.8 kHz self-sustained MEMS oscillator that integrates the fundamental in-plane mode resonance of a single-crystal silicon-on-insulator (SOI) resonator with a programmable and reconfigurable single-chip CMOS sustaining amplifier. Temperature compensation using a linear equation fit and look-up table (LUT) is used to obtain the near-zero closed-loop temperature coefficient of frequency (TCf) at around room temperature (~25 °C). When subject to small temperature fluctuations in an indoor environment, the temperature-compensated oscillator shows a >2-fold improvement in Allan deviation over the uncompensated counterpart on relatively long time scales (averaging time τ > 10,000 s), as well as overall enhanced stability throughout the averaging time range from τ = 1 to 20,000 s. The proposed temperature compensation algorithm has low computational complexity and memory requirement, making it suitable for implementation on energy-constrained platforms such as Internet of Things (IoT) sensor nodes.

| S-EPMC6266509 | biostudies-literature

Single-Step Fabrication of Polymer Nanocomposite Films.

Project description:Polymer nanocomposites are employed in (micro)electronic, biomedical, structural and optical applications. Their fabrication is challenging due to nanoparticle (filler) agglomeration and settling, increased viscosity of blended solutions and multiple tedious processing steps, just to name a few. Often this leads to an upper limit for filler content, requirements for filler?polymer interfacial chemistry and expensive manufacturing. As a result, novel but simple processes for nanocomposite manufacture that overcome such hurdles are needed. Here, a truly single-step procedure for synthesis of polymer nanocomposite films, structures and patterns at high loadings of nanoparticles (for example, >24 vol %) for a variety of compositions is presented. It is highly versatile with respect to rapid preparation of films possessing multiple layers and filler content gradients even on untreated challenging substrates (paper, glass, polymers). Such composites containing homogeneously dispersed nanoparticles even at high loadings can improve the mechanical strength of hydrogels, load-bearing ability of fragile microstructures, gas permeability in thin barriers, performance of dielectrics and device integration in stretchable electronics.

| S-EPMC6073108 | biostudies-literature

One step fabrication of Silicon nanocones with wide-angle enhanced light absorption.

Project description:We report the fabrication of an array of random Silicon nanocones using a KrF excimer laser. A 370?nm thick amorphous Silicon layer deposited on a glass substrate was used in the process. The fabricated nanocones showed a large and broadband absorption enhancement over the entire visible wavelength range. An enhancement up to 350% is measured at ??=?650?nm. Additionally, the laser irradiation caused the nanocones to crystallize. The effect of changing the laser parameters (i.e. energy density, time, and frequency) on the morphology and the absorption is studied and compared. Wide-angle anti-reflective properties have been observed for the fabricated nanocones with less than 10% reflection for angles up to 60°. The major limitation of amorphous silicon thin film solar cells is the reduced absorption. This problem could be solved if light is trapped efficiently inside the thin film without the need of increasing the film thickness. The random array of nanocones presented in this work showed a substantial increase in absorption over a wide angle, were fabricated at a low cost and are easily scalable. This technique offers a fast approach which could significantly help in overcoming the absorption limitation.

| S-EPMC5838109 | biostudies-literature

Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates.

Project description:This paper details the application of phosphorus monolayer doping of silicon on insulator substrates. There have been no previous publications dedicated to the topic of MLD on SOI, which allows for the impact of reduced substrate dimensions to be probed. The doping was done through functionalization of the substrates with chemically bound allyldiphenylphosphine dopant molecules. Following functionalization, the samples were capped and annealed to enable the diffusion of dopant atoms into the substrate and their activation. Electrical and material characterisation was carried out to determine the impact of MLD on surface quality and activation results produced by the process. MLD has proven to be highly applicable to SOI substrates producing doping levels in excess of 1 × 1019 cm-3 with minimal impact on surface quality. Hall effect data proved that reducing SOI dimensions from 66 to 13 nm lead to an increase in carrier concentration values due to the reduced volume available to the dopant for diffusion. Dopant trapping was found at both Si-SiO2 interfaces and will be problematic when attempting to reach doping levels achieved by rival techniques.

| S-EPMC6122086 | biostudies-literature

Fabrication of Amorphous Silicon-Carbon Hybrid Films Using Single-Source Precursors.

Project description:The aim of this study was the preparation of different amorphous silicon-carbon hybrid thin-layer materials according to the liquid phase deposition (LPD) process using single-source precursors. In our study, 2-methyl-2-silyltrisilane (methylisotetrasilane; 2), 1,1,1-trimethyl-2,2-disilyltrisilane (trimethylsilylisotetrasilane; 3), 2-phenyl-2-silyltrisilane (phenylisotetrasilane; 4), and 1,1,2,2,4,4,5,5-octamethyl-3,3,6,6-tetrasilylcyclohexasilane (cyclohexasilane; 5) were utilized as precursor materials and compared with the parent compound 2,2-disilyltrisilane (neopentasilane; 1). Compounds 2-5 were successfully oligomerized at λ = 365 nm with catalytic amounts of the neopentasilane oligomer (NPO). These oligomeric mixtures (NPO and 6-9) were used for the preparation of thin-layer materials. Optimum solution and spin coating conditions were investigated, and amorphous silicon-carbon films were obtained. All thin-layer materials were characterized via UV/vis spectroscopy, light microscopy, spectroscopic ellipsometry, XPS, SEM, and SEM/EDX. Our results show that the carbon content and especially the bandgap can be easily tuned using these single-source precursors via LPD.

| S-EPMC10523434 | biostudies-literature

Bottom-up Fabrication of Graphene on Silicon/Silica Substrate via a Facile Soft-hard Template Approach.

Project description:In this work, a novel soft-hard template method towards the direct fabrication of graphene films on silicon/silica substrate is developed via a tri-constituent self-assembly route. Using cetyl trimethyl ammonium bromide (CTAB) as a soft template, silica (SiO2) from tetramethoxysilane as a hard template, and pyrene as a carbon source, the self-assembly process allows the formation of a sandwich-like SiO2/CTAB/pyrene composite, which can be further converted to high quantity graphene films with a thickness of ~1 nm and a size of over 5 μm by thermal treatment. The morphology and thickness of the graphene films can be effectively controlled through the adjustment of the ratio of pyrene to CTAB. Furthermore, a high nonlinear refractive index n2 of ~10(-12) m(2) W(-1) is measured from graphene/silica hybrid film, which is six orders of magnitude larger than that of silicon and comparable to the graphene from chemical vapor deposition process.

| S-EPMC4550833 | biostudies-literature

Single-Step Fabrication of Computationally Designed Microneedles by Continuous Liquid Interface Production.

Project description:Microneedles, arrays of micron-sized needles that painlessly puncture the skin, enable transdermal delivery of medications that are difficult to deliver using more traditional routes. Many important design parameters, such as microneedle size, shape, spacing, and composition, are known to influence efficacy, but are notoriously difficult to alter due to the complex nature of microfabrication techniques. Herein, we utilize a novel additive manufacturing ("3D printing") technique called Continuous Liquid Interface Production (CLIP) to rapidly prototype sharp microneedles with tuneable geometries (size, shape, aspect ratio, spacing). This technology allows for mold-independent, one-step manufacturing of microneedle arrays of virtually any design in less than 10 minutes per patch. Square pyramidal CLIP microneedles composed of trimethylolpropane triacrylate, polyacrylic acid and photopolymerizable derivatives of polyethylene glycol and polycaprolactone were fabricated to demonstrate the range of materials that can be utilized within this platform for encapsulating and controlling the release of therapeutics. These CLIP microneedles effectively pierced murine skin ex vivo and released the fluorescent drug surrogate rhodamine.

| S-EPMC5015976 | biostudies-literature

A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate.

Project description:A novel low-cost 2D silicon nano-mold fabrication technique was developed based on Cu inclined-deposition and Ar(+) (argon ion) etching. With this technique, sub-100 nm 2D (two dimensional) nano-channels can be etched economically over the whole area of a 4 inch n-type <100> silicon wafer. The fabricating process consists of only 4 steps, UV (Ultraviolet) lithography, inclined Cu deposition, Ar(+) sputter etching, and photoresist &Cu removing. During this nano-mold fabrication process, we investigated the influence of the deposition angle on the width of the nano-channels and the effect of Ar(+) etching time on their depth. Post-etching measurements showed the accuracy of the nanochannels over the whole area: the variation in width is 10%, in depth it is 11%. However, post-etching measurements also showed the accuracy of the nanochannels between chips: the variation in width is 2%, in depth it is 5%. With this newly developed technology, low-cost and large scale 2D nano-molds can be fabricated, which allows commercial manufacturing of nano-components over large areas.

| S-EPMC4707436 | biostudies-literature

One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance.

Project description:We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without any anti-reflective layers, and down to only 0.33% with a silicon nitride coating. The results from angle resolved scattering measurements indicate that the existence of triple reflections is responsible for the reduced reflectance. The surfaces with the nano inverted pyramids also exhibit a distinct milky white color.

| S-EPMC5057096 | biostudies-literature

Single-step holographic fabrication of large-area periodically corrugated metal films.

Project description:We have developed a simple, high-throughput, and cost-effective method to fabricate one-dimensional and two-dimensional periodically corrugated silver films over centimeter scale areas. This fabrication uses a single-step holographic patterning technique with laser intensities as low as 88.8 mW/cm(2) to deposit silver nanoparticles directly from solution to create gratings with periodicities of 570 nm. A dip in the transmission spectrum for these samples is observed due to certain visible wavelengths coupling to surface plasmon polaritons (SPPs) and the peak wavelength of this dip has a linear relationship with the surrounding material's refractive index (RI) with a sensitivity of 553.4 nm/RIU. The figure of merit (the ratio of refractive index sensitivity to the full width at half maximum (FWHM)) is typically in the range of 12-23. Our technique enables single-step fabrication of uniform, sub-wavelength periodic metal structures over a large area with low cost. Such sub-wavelength periodic metal structures are promising candidates as disposable sensors in applications such as affordable environmental monitoring systems and point-of-care diagnostics.

| S-EPMC3528713 | biostudies-other

OmicsDI is part of the ELIXIR infrastructure

OmicsDI is an Elixir interoperability service. Learn more ›

Tweets

OmicsDI Databases

PRIDE
PeptideAtlas
MassIVE
JPOST Repository
Physiome Model Repository

EGA
EVA
ENA
LINCS
PAXDB
Cell Collective

MetaboLights
Metabolomics Workbench
MetabolomeExpress
GNPS
BioModels
FAIRDOMHub

ArrayExpress
dbGaP
ExpressionAtlas
GEO
NODE

Information

Databases
Help
API
Contact us
Code on GitHub
Terms of use
Submit Data