Ontology highlight
ABSTRACT:
SUBMITTER: Choi J
PROVIDER: S-EPMC6474418 | biostudies-literature | 2018 Nov
REPOSITORIES: biostudies-literature
Choi Junseo J Jia Zheng Z Park Sunggook S
Microelectronic engineering 20180719
We report on a simple and effective process that allows fabricating polymeric dual-scale nanoimprinting molds. The key for the process is the use of a thin flexible SU-8 stencil membrane, which was fabricated by either photolithography or thermal nanoimprint lithography (NIL). The stencil membrane with microscale pores was assembled into a nanopatterned substrate, producing a dual-scale structure. The assembled structure was used as a template to produce polymeric imprinting molds via UV-NIL. Wi ...[more]