Ontology highlight
ABSTRACT:
SUBMITTER: Albu C
PROVIDER: S-EPMC6484281 | biostudies-literature | 2019 Jun
REPOSITORIES: biostudies-literature
Albu Camelia C Eremia Sandra A V SAV Veca Monica Lucia ML Veca Monica Lucia ML Avram Andrei A Popa Radu Cristian RC Pachiu Cristina C Romanitan Cosmin C Kusko Mihaela M Gavrila Raluca R Radoi Antonio A
Data in brief 20190416
A Si wafer coated with a low temperature oxide (LTO) was used as substrate (Si/SiO<sub>2</sub>) during the deposition of a thick nano-crystalline graphite (NCG) film by means of plasma-enhanced chemical vapour deposition (PECVD) procedure. The process parameters, the atomic force (AFM) and scanning electron (SEM) micrographs, Raman spectrum and X-ray diffraction (XRD) pattern are herein illustrated. The as deposited NCG film was electrochemically pretreated (3 mA applied current, during 240 s, i ...[more]