Multilayered skyscraper microchips fabricated by hybrid "all-in-one" femtosecond laser processing.

ABSTRACT: Multilayered microfluidic channels integrated with functional microcomponents are the general trend of future biochips, which is similar to the history of Si-integrated circuits from the planer to the three-dimensional (3D) configuration, since they offer miniaturization while increasing the integration degree and diversifying the applications in the reaction, catalysis, and cell cultures. In this paper, an optimized hybrid processing technology is proposed to create true multilayered microchips, by which "all-in-one" 3D microchips can be fabricated with a successive procedure of 3D glass micromachining by femtosecond-laser-assisted wet etching (FLAE) and the integration of microcomponents into the fabricated microchannels by two-photon polymerization (TPP). To create the multilayer

SUBMITTER: Wang C 

PROVIDER: S-EPMC6500790 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature