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Crystallographic contributions to piezoelectric properties in PZT thin films.


ABSTRACT: We report on the correlated investigation between macroscopic piezoelectric properties and the microscopic deformation of crystal structures of both epitaxial and polycrystalline Pb(Zr,Ti)O3 (PZT) thin films grown on MgO and Si substrates, respectively. We observed the reversible elongation and contraction of lattice parameter under an applied electric field using synchrotron X-ray diffraction. The effective piezoelectric coefficients were estimated from the relationship between electric field and field-induced strain, and compared with those characterized by the macroscopic cantilever method. The electric field dependences of the piezoelectric coefficients obtained from both characterization were in good agreement with each other. The results also revealed large and nonlinear piezoelectric properties for the polycrystalline PZT thin film. The comparative discussion in this study provides valuable insights of crystallographic contributions and opens the way to improve the piezoelectricity in thin-film based piezoelectric devices.

SUBMITTER: Tan G 

PROVIDER: S-EPMC6514214 | biostudies-literature | 2019 May

REPOSITORIES: biostudies-literature

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Crystallographic contributions to piezoelectric properties in PZT thin films.

Tan Goon G   Maruyama Kazuki K   Kanamitsu Yuya Y   Nishioka Shintaro S   Ozaki Tomoatsu T   Umegaki Toshihito T   Hida Hirotaka H   Kanno Isaku I  

Scientific reports 20190513 1


We report on the correlated investigation between macroscopic piezoelectric properties and the microscopic deformation of crystal structures of both epitaxial and polycrystalline Pb(Zr,Ti)O<sub>3</sub> (PZT) thin films grown on MgO and Si substrates, respectively. We observed the reversible elongation and contraction of lattice parameter under an applied electric field using synchrotron X-ray diffraction. The effective piezoelectric coefficients were estimated from the relationship between elect  ...[more]

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