Dataset Information

Epoxy Resins for Negative Tone Photoresists.

ABSTRACT: One of the types of negative tone photoresists is composed of at least a catalyst, a solvent, and epoxy resin. This is the primary raw material for lithography technology. To ensure high-quality pattern transfer in the lithography process, it is crucial to control the properties of the photoresist. In this work, a set of resins based on Bisphenol-A were synthesized. The obtained resins have been characterized regarding the chain size and its derivative products. As a second step, an epoxidation reaction was performed and the epoxy groups were quantified. The profile of the resins, obtained by mass spectroscopy (ESI-µ-TOF-MS), showed that it is possible to tune the chain sizes of the polymers and their derivate by controlling the parameters of the polymerization reaction. Three profiles of resins were achieved in this study. Nuclear magnetic resonance (NMR) indicates an epoxidation in the range of 96%, when comparing the phenolic peak intensity before and after the reaction. Differential Scan Calorimetry (DSC) measurements confirmed the different oligomer profiles of resins, showing different glass transition temperatures.

SUBMITTER: Vlnieska V

PROVIDER: S-EPMC6780111 | biostudies-literature | 2019 Sep

REPOSITORIES: biostudies-literature

ACCESS DATA

Publications

Epoxy Resins for Negative Tone Photoresists.

Vlnieska Vitor V Mikhaylov Andrey A Zakharova Margarita M Blasco Eva E Kunka Danays D

Polymers 20190906 9

One of the types of negative tone photoresists is composed of at least a catalyst, a solvent, and epoxy resin. This is the primary raw material for lithography technology. To ensure high-quality pattern transfer in the lithography process, it is crucial to control the properties of the photoresist. In this work, a set of resins based on Bisphenol-A were synthesized. The obtained resins have been characterized regarding the chain size and its derivative products. As a second step, an epoxidation ...[more]

PMID: 31500104

Similar Datasets

Project description:Photoresists (or photo-resins) are the main and most important raw material used for lithography techniques such as deep X-ray (DXRL), ultraviolet (UVL), deep-UV (DUVL), and extreme UV (EUVL). In previous work, we showed how complicated could be the synthesis of the resins used to produce photoresist. In this study, we follow up on the strategy of tuning deep and macro levels of properties to formulate photo-resins. They were developed from a primary basis, using epoxy resins, a solvent, and a photoinitiator in several concentrations. The formulations were evaluated initially by the UVL technique, using a squared pattern of 2.3 mm2. The most suitable compositions were then studied in a pattern structure varying from 50 down to 1 µm width, applying UVL and DUVL. The patterned structures were compared with the chemical composition of the photo-resins. Considering the deep level of properties, polydispersion, and epoxidation degree were evaluated. Regarding the macro level of properties, the concentration of photoinitiator was studied. Promising results have been achieved with the control of the deep and macro levels methodology. By means of UV lithography, it was possible to note, for a large feature size above 2.0 mm2, the formulations presented good quality structures with a broad range of epoxidation degrees and photoinitiator concentrations, respectively from 3 to 100% (mol·molpolymer-1) and from 10 to 40% (mol·molpolymer-1). For structures smaller than 50 µm width, the composition of the photo-resins may be restricted to a narrow range of values regarding the formulation. The results indicate that the polydispersion of the oligomers might be a significant property to control. There is a tendency to better outcome with a low polydispersity (resins P1 and P2). Regarding UV and deep-UV irradiation, the best results were achieved with UV. Nevertheless, for DUV, the sensitivity seems to be more intense, leading to well-defined structures with over-exposure effects.

Dataset Information

Epoxy Resins for Negative Tone Photoresists.

Publications

Epoxy Resins for Negative Tone Photoresists.

Similar Datasets

OmicsDI is part of the ELIXIR infrastructure

Tweets