Ontology highlight
ABSTRACT:
SUBMITTER: Grishina DA
PROVIDER: S-EPMC6933814 | biostudies-literature | 2019 Dec
REPOSITORIES: biostudies-literature
Grishina Diana A DA Harteveld Cornelis A M CAM Pacureanu Alexandra A Devashish D D Lagendijk Ad A Cloetens Peter P Vos Willem L WL
ACS nano 20191212 12
To investigate the performance of three-dimensional (3D) nanostructures, it is vital to study their internal structure with a methodology that keeps the device fully functional and ready for further integration. To this aim, we introduce here traceless X-ray tomography (TXT) that combines synchrotron X-ray holographic tomography with high X-ray photon energies (17 keV) in order to study nanostructures "as is" on massive silicon substrates. The combined strengths of TXT are a large total sample s ...[more]