Ontology highlight
ABSTRACT:
SUBMITTER: Yu K
PROVIDER: S-EPMC6944520 | biostudies-literature | 2019
REPOSITORIES: biostudies-literature
Yu Kaihao K Xu Tao T Wu Xing X Wang Wen W Zhang Hui H Zhang Qiubo Q Tang Luping L Sun Litao L
Research (Washington, D.C.) 20191030
The growth of crystalline Si (c-Si) via direct electron beam writing shows promise for fabricating Si nanomaterials due to its ultrahigh resolution. However, to increase the writing speed is a major obstacle, due to the lack of systematic experimental explorations of the growth process and mechanisms. This paper reports a systematic experimental investigation of the beam-induced formation of c-Si nanoparticles (NPs) from amorphous SiO<sub>2</sub> under a range of doses and temperatures by in sit ...[more]