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A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion.

ABSTRACT: Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, and each working mode is validated separately, confirming its fast motion (0~50?mm/s) in macromotion mode, micromotion (0~135??m/s) and nanomotion (minimum step: 0~2?nm) in piezoelectric step and servomotion modes. The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.

SUBMITTER: Gao X

PROVIDER: S-EPMC6946261 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature

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A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion.

Gao Xiangyu X Li Zhanmiao Z Wu Jingen J Xin Xudong X Shen Xinyi X Yuan Xiaoting X Yang Jikun J Chu Zhaoqiang Z Dong Shuxiang S

Research (Washington, D.C.) 20191113

Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, ...[more]

PMID: 31922139

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