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Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition.

ABSTRACT: Degenerately doped ZnO is seen as a potential substitute to the ubiquitous and expensive Sn doped In2O3 as a transparent electrode in optoelectronic devices. Here, highly conductive and transparent Ga doped ZnO thin films were grown via aerosol assisted chemical vapor deposition. The lowest resistivity (7.8?×?10-4 ?.cm) and highest carrier concentration (4.23?×?1020?cm-3) ever reported for AACVD grown ZnO: Ga was achieved due to using oxygen poor growth conditions enabled by diethylzinc and triethylgallium precursors.

SUBMITTER: Ponja SD

PROVIDER: S-EPMC6971236 | biostudies-literature | 2020 Jan

REPOSITORIES: biostudies-literature

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Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition.

Ponja Sapna D SD Sathasivam Sanjayan S Parkin Ivan P IP Carmalt Claire J CJ

Scientific reports 20200120 1

Degenerately doped ZnO is seen as a potential substitute to the ubiquitous and expensive Sn doped In2O3 as a transparent electrode in optoelectronic devices. Here, highly conductive and transparent Ga doped ZnO thin films were grown via aerosol assisted chemical vapor deposition. The lowest resistivity (7.8 × 10-4 Ω.cm) and highest carrier concentration (4.23 × 1020 cm-3) ever reported for AACVD grown ZnO: Ga was achieved due to using oxygen ...[more]

PMID: 31959884

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