Ontology highlight
ABSTRACT:
SUBMITTER: Li CH
PROVIDER: S-EPMC7090337 | biostudies-literature | 2020 Jun
REPOSITORIES: biostudies-literature
Li Chen-Hui CH Abadias Grégory G Belliard Laurent L Hu Qing Miao QM Greneche Nicolas N Djemia Philippe P
Data in brief 20200311
These data are supplied for supporting their interpretations and discussions provided in the research article "Large influence of vacancies on the elastic constants of cubic epitaxial tantalum nitride layers grown by reactive magnetron sputtering" by Abadias et al. (2020) [doi: 10.1016/j.actamat.2019.11.041]. The datasheet describes the experimental methods used to measure the longitudinal (V<sub>L</sub>) and transverse (V<sub>T</sub>) sound velocities of cubic epitaxial TaN/MgO thin films, and ...[more]