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Microscopic sensors using optical wireless integrated circuits.

ABSTRACT: We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic microlight emitting diodes (LEDs) into a 100-?m-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in ?10,000 individual sensors per square inch. To illustrate their use, we show proof-of-concept measurements recording voltage, temperature, pressure, and conductivity in a variety of environments.

SUBMITTER: Cortese AJ

PROVIDER: S-EPMC7196798 | biostudies-literature | 2020 Apr

REPOSITORIES: biostudies-literature

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Microscopic sensors using optical wireless integrated circuits.

Cortese Alejandro J AJ Smart Conrad L CL Wang Tianyu T Reynolds Michael F MF Norris Samantha L SL Ji Yanxin Y Lee Sunwoo S Mok Aaron A Wu Chunyan C Xia Fei F Ellis Nathan I NI Molnar Alyosha C AC Xu Chris C McEuen Paul L PL

Proceedings of the National Academy of Sciences of the United States of America 20200417 17

We present a platform for parallel production of standalone, untethered electronic sensors that are truly microscopic, i.e., smaller than the resolution of the naked eye. This platform heterogeneously integrates silicon electronics and inorganic microlight emitting diodes (LEDs) into a 100-μm-scale package that is powered by and communicates with light. The devices are fabricated, packaged, and released in parallel using photolithographic techniques, resulting in ∼10,000 individual sensors per s ...[more]

PMID: 32303653

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