Ontology highlight
ABSTRACT:
SUBMITTER: Chen M
PROVIDER: S-EPMC7260211 | biostudies-literature | 2020 May
REPOSITORIES: biostudies-literature
Nature communications 20200529 1
As the backbone material of the information age, silicon is extensively used as a functional semiconductor and structural material in microelectronics and microsystems. At ambient temperature, the brittleness of Si limits its mechanical application in devices. Here, we demonstrate that Si processed by modern lithography procedures exhibits an ultrahigh elastic strain limit, near ideal strength (shear strength ~4 GPa) and plastic deformation at the micron-scale, one order of magnitude larger than ...[more]