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CuO-Ga2O3 Thin Films as a Gas-Sensitive Material for Acetone Detection.

ABSTRACT: The p-n heterostructures of CuO-Ga2O3 obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the air/acetone atmosphere in the range of 0.1-1.25 ppm, as well as at various relative humidity (RH) levels (10-85%). The highest responses were obtained for samples based on the CuO-Ga2O3 (4% at. Ga).

SUBMITTER: Dyndal K

PROVIDER: S-EPMC7309060 | biostudies-literature | 2020 Jun

REPOSITORIES: biostudies-literature

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CuO-Ga2O3 Thin Films as a Gas-Sensitive Material for Acetone Detection.

Dyndal Katarzyna K Zarzycki Arkadiusz A Andrysiewicz Wojciech W Grochala Dominik D Marszalek Konstanty K Rydosz Artur A

Sensors (Basel, Switzerland) 20200602 11

The p-n heterostructures of CuO-Ga2O3 obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the ...[more]

PMID: 32498287

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