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CuO-Ga2O3 Thin Films as a Gas-Sensitive Material for Acetone Detection.


ABSTRACT: The p-n heterostructures of CuO-Ga2O3 obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the air/acetone atmosphere in the range of 0.1-1.25 ppm, as well as at various relative humidity (RH) levels (10-85%). The highest responses were obtained for samples based on the CuO-Ga2O3 (4% at. Ga).

SUBMITTER: Dyndal K 

PROVIDER: S-EPMC7309060 | biostudies-literature | 2020 Jun

REPOSITORIES: biostudies-literature

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CuO-Ga<sub>2</sub>O<sub>3</sub> Thin Films as a Gas-Sensitive Material for Acetone Detection.

Dyndal Katarzyna K   Zarzycki Arkadiusz A   Andrysiewicz Wojciech W   Grochala Dominik D   Marszalek Konstanty K   Rydosz Artur A  

Sensors (Basel, Switzerland) 20200602 11


The p-n heterostructures of CuO-Ga<sub>2</sub>O<sub>3</sub> obtained by magnetron sputtering technology in a fully reactive mode (deposition in pure oxygen) were tested under exposure to low acetone concentrations. After deposition, the films were annealed at previously confirmed conditions (400 °C/4 h/synthetic air) and further investigated by utilization of X-ray diffraction (XRD), X-ray reflectivity (XRR), energy-dispersive X-ray spectroscopy (EDS). The gas-sensing behavior was tested in the  ...[more]

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