Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation.

ABSTRACT: This article reports a process for batch fabrication of a fiber pigtailed optomechanical transducer platform with overhanging. The platform enables a new class of high bandwidth, high sensitivity, and highly integrated sensors that are, compact, robust, and small, with the potential potential for low cost batch fabrication inherent in Micro-Opto-Electro-Mechanical-Systems technology. This article provides a guide to the whole fabrication process and explains critical steps and process choices in detail. Possible alternative fabrication techniques and problems are discussed. The fabrication process consists of electron beam lithography, i-line stepper lithography, and back- and frontside mask aligner lithography. The goal of this article is to provide a comprehensive description of the fabr

SUBMITTER: Michels T 

PROVIDER: S-EPMC7340551 | biostudies-literature | 2016

REPOSITORIES: biostudies-literature