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Nanoelectromechanical Sensors Based on Suspended 2D Materials.

ABSTRACT: The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

SUBMITTER: Lemme MC

PROVIDER: S-EPMC7388062 | biostudies-literature | 2020

REPOSITORIES: biostudies-literature

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Nanoelectromechanical Sensors Based on Suspended 2D Materials.

Lemme Max C MC Wagner Stefan S Lee Kangho K Fan Xuge X Verbiest Gerard J GJ Wittmann Sebastian S Lukas Sebastian S Dolleman Robin J RJ Niklaus Frank F van der Zant Herre S J HSJ Duesberg Georg S GS Steeneken Peter G PG

Research (Washington, D.C.) 20200720

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and d ...[more]

PMID: 32766550

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