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Nanoscale light element identification using machine learning aided STEM-EDS.


ABSTRACT: Light element identification is necessary in materials research to obtain detailed insight into various material properties. However, reported techniques, such as scanning transmission electron microscopy (STEM)-energy dispersive X-ray spectroscopy (EDS) have inadequate detection limits, which impairs identification. In this study, we achieved light element identification with nanoscale spatial resolution in a multi-component metal alloy through unsupervised machine learning algorithms of singular value decomposition (SVD) and independent component analysis (ICA). Improvement of the signal-to-noise ratio (SNR) in the STEM-EDS spectrum images was achieved by combining SVD and ICA, leading to the identification of a nanoscale N-depleted region that was not observed in as-measured STEM-EDS. Additionally, the formation of the nanoscale N-depleted region was validated using STEM-electron energy loss spectroscopy and multicomponent diffusional transformation simulation. The enhancement of SNR in STEM-EDS spectrum images by machine learning algorithms can provide an efficient, economical chemical analysis method to identify light elements at the nanoscale.

SUBMITTER: Kim HK 

PROVIDER: S-EPMC7426414 | biostudies-literature | 2020 Aug

REPOSITORIES: biostudies-literature

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Nanoscale light element identification using machine learning aided STEM-EDS.

Kim Hong-Kyu HK   Ha Heon-Young HY   Bae Jee-Hwan JH   Cho Min Kyung MK   Kim Juyoung J   Han Jeongwoo J   Suh Jin-Yoo JY   Kim Gyeung-Ho GH   Lee Tae-Ho TH   Jang Jae Hoon JH   Chun Dongwon D  

Scientific reports 20200813 1


Light element identification is necessary in materials research to obtain detailed insight into various material properties. However, reported techniques, such as scanning transmission electron microscopy (STEM)-energy dispersive X-ray spectroscopy (EDS) have inadequate detection limits, which impairs identification. In this study, we achieved light element identification with nanoscale spatial resolution in a multi-component metal alloy through unsupervised machine learning algorithms of singul  ...[more]

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