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Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication.

ABSTRACT: As a promising energy converter, the requirement for miniaturization and high-accuracy of triboelectric nanogenerators always remains urgent. In this work, a micro triboelectric ultrasonic device was developed by integrating a triboelectric nanogenerator and micro-electro-mechanical systems technology. To date, it sets a world record for the smallest triboelectric device, with a 50?µm-sized diaphragm, and enables the working frequency to be brought to megahertz. This dramatically improves the miniaturization and chip integration of the triboelectric nanogenerator. With 63?kPa@1?MHz ultrasound input, the micro triboelectric ultrasonic device can generate the voltage signal of 16.8?mV and 12.7?mV through oil and sound-attenuation medium, respectively. It also achieved the signal-to-ratio of 20.54?dB and exhibited the practical potential for signal communication by modulating the incident ultrasound. Finally, detailed optimization approaches have also been proposed to further improve the output power of the micro triboelectric ultrasonic device.

SUBMITTER: Chen C

PROVIDER: S-EPMC7434882 | biostudies-literature | 2020 Aug

REPOSITORIES: biostudies-literature

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Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication.

Chen Chen C Wen Zhen Z Shi Jihong J Jian Xiaohua X Li Peiyang P Yeow John T W JTW Sun Xuhui X

Nature communications 20200818 1

As a promising energy converter, the requirement for miniaturization and high-accuracy of triboelectric nanogenerators always remains urgent. In this work, a micro triboelectric ultrasonic device was developed by integrating a triboelectric nanogenerator and micro-electro-mechanical systems technology. To date, it sets a world record for the smallest triboelectric device, with a 50 µm-sized diaphragm, and enables the working frequency to be brought to megahertz. This dramatically improves the mi ...[more]

PMID: 32811836

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Dataset Information

Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication.

Publications

Micro triboelectric ultrasonic device for acoustic energy transfer and signal communication.

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