Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution.
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ABSTRACT:
SUBMITTER: Chien MH
PROVIDER: S-EPMC7441496 | biostudies-literature | 2020 Aug
REPOSITORIES: biostudies-literature
Publications
Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution.
Chien Miao-Hsuan MH Steurer Johannes J Sadeghi Pedram P Cazier Nicolas N Schmid Silvan S
ACS photonics 20200715 8
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 μW and a repeatabi ...[more]
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