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Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution.

ABSTRACT: Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 ?W and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.

SUBMITTER: Chien MH

PROVIDER: S-EPMC7441496 | biostudies-literature | 2020 Aug

REPOSITORIES: biostudies-literature

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Nanoelectromechanical Position-Sensitive Detector with Picometer Resolution.

Chien Miao-Hsuan MH Steurer Johannes J Sadeghi Pedram P Cazier Nicolas N Schmid Silvan S

ACS photonics 20200715 8

Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/ for a low laser power of 85 μW and a repeatabi ...[more]

PMID: 32851117

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