Ontology highlight
ABSTRACT:
SUBMITTER: Zhang H
PROVIDER: S-EPMC7540345 | biostudies-literature | 2020 Jun
REPOSITORIES: biostudies-literature
Zhang Haojie H Hagen Dirk J DJ Li Xiaopeng X Graff Andreas A Heyroth Frank F Fuhrmann Bodo B Kostanovskiy Ilya I Schweizer Stefan L SL Caddeo Francesco F Maijenburg A Wouter AW Parkin Stuart S Wehrspohn Ralf B RB
Angewandte Chemie (International ed. in English) 20200807 39
Transition-metal phosphides (TMP) prepared by atomic layer deposition (ALD) are reported for the first time. Ultrathin Co-P films were deposited by using PH<sub>3</sub> plasma as the phosphorus source and an extra H<sub>2</sub> plasma step to remove excess P in the growing films. The optimized ALD process proceeded by self-limited layer-by-layer growth, and the deposited Co-P films were highly pure and smooth. The Co-P films deposited via ALD exhibited better electrochemical and photoelectrochem ...[more]