Ontology highlight
ABSTRACT:
SUBMITTER: Lee SI
PROVIDER: S-EPMC7690583 | biostudies-literature | 2020 Oct
REPOSITORIES: biostudies-literature
Lee Sang Il SI Jang Seong Hyun SH Han Young Joon YJ Lee Jun Yeub JY Choi Jun J Cho Kwan Hyun KH
Micromachines 20201022 11
This study experimentally investigated process mechanisms and characteristics of newly developed xenon flash lamp lift-off (XF-LO) technology, a novel thin film lift-off method using a light to heat conversion layer (LTHC) and a xenon flash lamp (XFL). XF-LO technology was used to lift-off polyimide (PI) films of 8.68-19.6 μm thickness. When XFL energy irradiated to the LTHC was 2.61 J/cm<sup>2</sup>, the PI film was completely released from the carrier substrate. However, as the energy intensit ...[more]