Ontology highlight
ABSTRACT:
SUBMITTER: Ryu H
PROVIDER: S-EPMC7763874 | biostudies-literature | 2020 Dec
REPOSITORIES: biostudies-literature
Nanomaterials (Basel, Switzerland) 20201209 12
In this work, we demonstrate the enhanced synaptic behaviors in trilayer dielectrics (HfO<sub>2</sub>/Si<sub>3</sub>N<sub>4</sub>/SiO<sub>2</sub>) on highly doped n-type silicon substrate. First, the three dielectric layers were subjected to material and chemical analyses and thoroughly investigated via transmission electron microscopy and X-ray photoelectron spectroscopy. The resistive switching and synaptic behaviors were improved by inserting a Si<sub>3</sub>N<sub>4</sub> layer between the Hf ...[more]