422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth.

ABSTRACT: High quality-factor (Q) optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration in a photonic waveguide platform is key to reducing cost, size, power and sensitivity to environmental disturbances. However, to date, the Q of all-waveguide resonators has been relegated to below 260 Million. Here, we report a Si₃N₄ resonator with 422 Million intrinsic and 3.4 Billion absorption-limited Qs. The resonator has 453?kHz intrinsic, 906?kHz loaded, and 57?kHz absorption-limited linewidths and the corresponding 0.060?dB?m^-1 loss is the lowest reported to date for waveguides with deposited oxide upper cladding. These results are achieved through a careful reduction of scattering and absorption losses that we simulate, quantify and correlate to measurements. This advancement in waveguide resonator technology paves the way to all-waveguide Billion Q cavities for applications including nonlinear optics, atomic clocks, quantum photonics and high-capacity fiber communications.

SUBMITTER: Puckett MW 

PROVIDER: S-EPMC7876138 | biostudies-literature | 2021 Feb

REPOSITORIES: biostudies-literature