Ontology highlight
ABSTRACT:
SUBMITTER: Seewald LM
PROVIDER: S-EPMC7911092 | biostudies-literature | 2021 Jan
REPOSITORIES: biostudies-literature
Seewald Lukas Matthias LM Winkler Robert R Kothleitner Gerald G Plank Harald H
Micromachines 20210122 2
Additive, direct-write manufacturing via a focused electron beam has evolved into a reliable 3D nanoprinting technology in recent years. Aside from low demands on substrate materials and surface morphologies, this technology allows the fabrication of freestanding, 3D architectures with feature sizes down to the sub-20 nm range. While indispensably needed for some concepts (e.g., 3D nano-plasmonics), the final applications can also be limited due to low mechanical rigidity, and thermal- or electr ...[more]