Ontology highlight
ABSTRACT:
SUBMITTER: Hussain M
PROVIDER: S-EPMC7913499 | biostudies-literature | 2021 Feb
REPOSITORIES: biostudies-literature
Hussain Muhammad M Jeong Woonyoung W Kang Il-Suk IS Choi Kyeong-Keun KK Jaffery Syed Hassan Abbas SHA Ali Asif A Hussain Tassawar T Ayaz Muhammad M Hussain Sajjad S Jung Jongwan J
Sensors (Basel, Switzerland) 20210203 4
Herein, the fabrication of a novel highly sensitive and fast hydrogen (H<sub>2</sub>) gas sensor, based on the Ta<sub>2</sub>O<sub>5</sub> Schottky diode, is described. First, Ta<sub>2</sub>O<sub>5</sub> thin films are deposited on silicon carbide (SiC) and silicon (Si) substrates via a radio frequency (RF) sputtering method. Then, Pd and Ni are respectively deposited on the front and back of the device. The deposited Pd serves as a H<sub>2</sub> catalyst, while the Ni functions as an Ohmic cont ...[more]